4‐2: State‐of‐the‐Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO‐IGZO Dual‐Layer Thin‐Film Transistor
You-Ron Lin; Wei-Chun Ma; Chun-Hung Lin; Jhih-Jie Liu
- Published
- Publisher
- Wiley
- Journal / collection
- SID Symposium Digest of Technical Papers
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/sdtp.18073
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Cite this source
You-Ron Lin; Wei-Chun Ma; Chun-Hung Lin; Jhih-Jie Liu. 4‐2: State‐of‐the‐Art Gas Separation Function in Dynamic New Aristo TWIN PVD System Proven with IGZTO‐IGZO Dual‐Layer Thin‐Film Transistor. SID Symposium Digest of Technical Papers. 2025-06. https://doi.org/10.1002/sdtp.18073