Feasibility study of a MEMS microphone based on the piezoresistivity of a field-effect transistor
Eunsik Noh; Chayeong Kim; Kumjae Shin; Wonkyu Moon
- Published
- Publisher
- Acoustical Society of America (ASA)
- Journal / collection
- The Journal of the Acoustical Society of America
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1121/10.0041223
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Cite this source
Eunsik Noh; Chayeong Kim; Kumjae Shin; Wonkyu Moon. Feasibility study of a MEMS microphone based on the piezoresistivity of a field-effect transistor. The Journal of the Acoustical Society of America. 2025-10-01. https://doi.org/10.1121/10.0041223