Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production
Umberto Amato; Anestis Antoniadis; Italia De Feis; Anastasiia Doinychko; Irène Gijbels; Antonino La Magna; Daniele Pagano; Francesco Piccinini; Easter Selvan Suviseshamuthu; Carlo Severgnini; Andres Torres; Patrizia Vasquez
- Published
- Publisher
- MDPI AG
- Journal / collection
- Sensors
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/s25134218
The original publisher provides the full text and its access options.
Cite this source
Umberto Amato; Anestis Antoniadis; Italia De Feis; Anastasiia Doinychko; Irène Gijbels; Antonino La Magna; Daniele Pagano; Francesco Piccinini; Easter Selvan Suviseshamuthu; Carlo Severgnini; Andres Torres; Patrizia Vasquez. Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production. Sensors. 2025-07-06. https://doi.org/10.3390/s25134218