Deterministic Millimeter-Scale Delayering for Advanced Semiconductor Failure Analysis and Reverse Engineering
Pawel Nowakowski; Michael Boccabella; Richard Wei-Chih Li; Mary Ray; Paul Fischione
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Failure Analysis and Prevention
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s11668-026-02523-5
The original publisher provides the full text and its access options.
Cite this source
Pawel Nowakowski; Michael Boccabella; Richard Wei-Chih Li; Mary Ray; Paul Fischione. Deterministic Millimeter-Scale Delayering for Advanced Semiconductor Failure Analysis and Reverse Engineering. Journal of Failure Analysis and Prevention. 2026-07-31. https://doi.org/10.1007/s11668-026-02523-5