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Metal-Induced Oxygen Vacancy Control in InGaZnO/Hf 0.5 Zr 0.5 O 2 Ferroelectric Field-Effect Transistor Arrays for Simultaneous Improvement of Memory Window and Electrical Stability

Jae Seong Han; Kyungmoon Kwak; Subi Choi; Ju Hyun Lee; Nam Su Heo; Kunho Moon; Hyun Jae Kim

Published
Publisher
American Chemical Society (ACS)
Journal / collection
ACS Nano
Research area
Semiconductors
Source type
Journal article
DOI
10.1021/acsnano.5c14197

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Jae Seong Han; Kyungmoon Kwak; Subi Choi; Ju Hyun Lee; Nam Su Heo; Kunho Moon; Hyun Jae Kim. Metal-Induced Oxygen Vacancy Control in InGaZnO/Hf 0.5 Zr 0.5 O 2 Ferroelectric Field-Effect Transistor Arrays for Simultaneous Improvement of Memory Window and Electrical Stability. ACS Nano. 2026-01-07. https://doi.org/10.1021/acsnano.5c14197

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