Artificial intelligence with open and scaled data sharing in semiconductor manufacturing
Sthitie Bom; Jim Davis; Said Jahanmir; Bruce Kramer; Don Ufford; Gregory W Vogl
- Published
- Publisher
- National Institute of Standards and Technology (U.S.)
- Research area
- AI & compute
- Source type
- Report
- DOI
- 10.6028/nist.ams.100-72
The original publisher provides the full text and its access options.
Cite this source
Sthitie Bom; Jim Davis; Said Jahanmir; Bruce Kramer; Don Ufford; Gregory W Vogl. Artificial intelligence with open and scaled data sharing in semiconductor manufacturing. National Institute of Standards and Technology (U.S.). 2025-11-18. https://doi.org/10.6028/nist.ams.100-72