Review of physicochemical-assisted nanomanufacturing processes for wide-bandgap semiconductor wafers
Kazuya Yamamura; Hui Deng; Yasuhisa Sano; Junji Murata; Xu Yang; Rongyan Sun
- Published
- Publisher
- Elsevier BV
- Journal / collection
- International Journal of Machine Tools and Manufacture
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ijmachtools.2025.104321
The original publisher provides the full text and its access options.
Cite this source
Kazuya Yamamura; Hui Deng; Yasuhisa Sano; Junji Murata; Xu Yang; Rongyan Sun. Review of physicochemical-assisted nanomanufacturing processes for wide-bandgap semiconductor wafers. International Journal of Machine Tools and Manufacture. 2025-10. https://doi.org/10.1016/j.ijmachtools.2025.104321