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Research literature / Conference paper

3-D Optical Interconnection of Bent Waveguides and Micro-Mirror by Planar Semiconductor Process

Keito Kikuchi; Taro Itatani; Yoshinobu Okano; Akihiro Noriki; Takeru Amano

Published
Publisher
IEEE
Journal / collection
2025 IEEE CPMT Symposium Japan (ICSJ)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/icsj66986.2025.11302725

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Keito Kikuchi; Taro Itatani; Yoshinobu Okano; Akihiro Noriki; Takeru Amano. 3-D Optical Interconnection of Bent Waveguides and Micro-Mirror by Planar Semiconductor Process. 2025 IEEE CPMT Symposium Japan (ICSJ). 2025-11-12. https://doi.org/10.1109/icsj66986.2025.11302725

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