A Comprehensive Study of the Impact of the Gate Oxide Material Composition on the Self-Heating Effect in Nanosheet Field Effect Transistor
A. E. Atamuratov; D. R. Rajapov; M. M. Khalilloev; K. Sivasankaran; M. Balasubbareddy; A.Yusupov
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Silicon
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s12633-025-03451-z
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Cite this source
A. E. Atamuratov; D. R. Rajapov; M. M. Khalilloev; K. Sivasankaran; M. Balasubbareddy; A.Yusupov. A Comprehensive Study of the Impact of the Gate Oxide Material Composition on the Self-Heating Effect in Nanosheet Field Effect Transistor. Silicon. 2025-10-02. https://doi.org/10.1007/s12633-025-03451-z