Reliability Analysis of Semiconductor Material Processing for Advanced Integrated Circuit Chip Manufacturing
Yihan Zhang; Shan Jiang; Daqiang Zhang
- Published
- Publisher
- MDPI AG
- Journal / collection
- Micromachines
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/mi17101131
The original publisher provides the full text and its access options.
Cite this source
Yihan Zhang; Shan Jiang; Daqiang Zhang. Reliability Analysis of Semiconductor Material Processing for Advanced Integrated Circuit Chip Manufacturing. Micromachines. 2026-09-28. https://doi.org/10.3390/mi17101131