Wafer shape control in semiconductor manufacturing
Pradeep K. Subrahmanyan; Ram Karur; Wonjae Lee; Olga Kucher; Changwoo Sun; Adaeze Osonkie; Heedon Hwang; Woosung Lee; Sang H. Rha; Jeseon Yeon; Hanmei Choi; Iksoo Kim
- Published
- Publisher
- SPIE
- Journal / collection
- Advanced Etch Technology and Process Integration for Nanopatterning XIV
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3051168
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Pradeep K. Subrahmanyan; Ram Karur; Wonjae Lee; Olga Kucher; Changwoo Sun; Adaeze Osonkie; Heedon Hwang; Woosung Lee; Sang H. Rha; Jeseon Yeon; Hanmei Choi; Iksoo Kim. Wafer shape control in semiconductor manufacturing. Advanced Etch Technology and Process Integration for Nanopatterning XIV. 2025-04-22. https://doi.org/10.1117/12.3051168