High-Resolution Hyperspectral SIMS for Advanced Semiconductor and Materials Analysis
Peter Gnauck; Alexander Ost; Torsten Richter
- Published
- Publisher
- Oxford University Press (OUP)
- Journal / collection
- Microscopy and Microanalysis
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1093/mam/ozag053.117
The original publisher provides the full text and its access options.
Cite this source
Peter Gnauck; Alexander Ost; Torsten Richter. High-Resolution Hyperspectral SIMS for Advanced Semiconductor and Materials Analysis. Microscopy and Microanalysis. 2026-07. https://doi.org/10.1093/mam/ozag053.117