Overview of the Application of Artificial Intelligence in Semiconductor Manufacturing Process Optimization and Defect Detection
Yichen Guo
- Published
- Publisher
- Wisvora Publishing
- Journal / collection
- Technological Pathways and Development
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.70693/h50y9788
The original publisher provides the full text and its access options.
Cite this source
Yichen Guo. Overview of the Application of Artificial Intelligence in Semiconductor Manufacturing Process Optimization and Defect Detection. Technological Pathways and Development. 2026-05-18. https://doi.org/10.70693/h50y9788