Application and modeling analysis of machine learning in semiconductor manufacturing
Shiqi FENG; Wei YAN; Xue CHEN; Yan LI; Hongquan LIU; Chuanxian HU; Zhaofeng LI; Zhongchao FAN; Xiaodong WANG
- Published
- Publisher
- China Science Publishing & Media Ltd.
- Journal / collection
- Chinese Journal of Semiconductors
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.3724/cjos.2025.004
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Cite this source
Shiqi FENG; Wei YAN; Xue CHEN; Yan LI; Hongquan LIU; Chuanxian HU; Zhaofeng LI; Zhongchao FAN; Xiaodong WANG. Application and modeling analysis of machine learning in semiconductor manufacturing. Chinese Journal of Semiconductors. 2026-09-01. https://doi.org/10.3724/cjos.2025.004