Real-Time Optical Quantification of Surface Diffusion in Semiconductor Nanostructures
Taeyeong Kim; Bong Jae Lee; Jungchul Lee
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/mems64181.2026.11419500
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Cite this source
Taeyeong Kim; Bong Jae Lee; Jungchul Lee. Real-Time Optical Quantification of Surface Diffusion in Semiconductor Nanostructures. 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS). 2026-01-25. https://doi.org/10.1109/mems64181.2026.11419500