High-uniformity HBr wet etching for compound semiconductor optoelectronics using precision single-wafer processing
Ismail Kashkoush; Sarah Pecha
- Published
- Publisher
- SPIE
- Journal / collection
- Smart Photonic and Optoelectronic Integrated Circuits 2026
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3079444
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Cite this source
Ismail Kashkoush; Sarah Pecha. High-uniformity HBr wet etching for compound semiconductor optoelectronics using precision single-wafer processing. Smart Photonic and Optoelectronic Integrated Circuits 2026. 2026-03-04. https://doi.org/10.1117/12.3079444