Nonlinear optical metrology of electronic interfaces for advanced semiconductor devices
Rishabh Mishra; Alvin Mo; Syed Hamad Ullah Shah; Shona McNab; Murad J. Tayebjee; Bram Hoex; Michael P. Nielsen
- Published
- Publisher
- SPIE
- Journal / collection
- Ultrafast Phenomena and Nanophotonics XXX
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3079024
The original publisher provides the full text and its access options.
Cite this source
Rishabh Mishra; Alvin Mo; Syed Hamad Ullah Shah; Shona McNab; Murad J. Tayebjee; Bram Hoex; Michael P. Nielsen. Nonlinear optical metrology of electronic interfaces for advanced semiconductor devices. Ultrafast Phenomena and Nanophotonics XXX. 2026-03-05. https://doi.org/10.1117/12.3079024