Automating Root Cause Analysis in Semiconductor Manufacturing Using Transformer Models With Explainable AI
Youssef Alothman; Mohamed Bader-El-Den; Lalit Maurya; Eslam Amer
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2026.3681810
The original publisher provides the full text and its access options.
Cite this source
Youssef Alothman; Mohamed Bader-El-Den; Lalit Maurya; Eslam Amer. Automating Root Cause Analysis in Semiconductor Manufacturing Using Transformer Models With Explainable AI. IEEE Transactions on Semiconductor Manufacturing. 2026-05. https://doi.org/10.1109/tsm.2026.3681810