Federated Learning for Semiconductor Digital Twins: A Privacy-Preserving Framework for Collaborative DUV Nanolithography
Haiyang Yun; Hao Chun Liao; Benyamin Davaji; Peter C. Doerschuk; Amit Lal
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/asmc69324.2026.11551197
The original publisher provides the full text and its access options.
Cite this source
Haiyang Yun; Hao Chun Liao; Benyamin Davaji; Peter C. Doerschuk; Amit Lal. Federated Learning for Semiconductor Digital Twins: A Privacy-Preserving Framework for Collaborative DUV Nanolithography. 2026 37th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2026-05-11. https://doi.org/10.1109/asmc69324.2026.11551197