Optimization and defect control in photoresist etch back processes for advanced semiconductor technologies
Ting Lei; Zhehong Liu; Zhiwen Liu; Guangjie Xue; Chun Sun; Jun Zhou; Xiangshui Miao
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Journal of Semiconductors
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1674-4926/25070024
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Cite this source
Ting Lei; Zhehong Liu; Zhiwen Liu; Guangjie Xue; Chun Sun; Jun Zhou; Xiangshui Miao. Optimization and defect control in photoresist etch back processes for advanced semiconductor technologies. Journal of Semiconductors. 2026-03-01. https://doi.org/10.1088/1674-4926/25070024