AI-Powered Next-Generation Technology for Semiconductor Optical Metrology: A Review
Weiwang Xu; Houdao Zhang; Lingjing Ji; Zhongyu Li
- Published
- Publisher
- MDPI AG
- Journal / collection
- Micromachines
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/mi16080838
The original publisher provides the full text and its access options.
Cite this source
Weiwang Xu; Houdao Zhang; Lingjing Ji; Zhongyu Li. AI-Powered Next-Generation Technology for Semiconductor Optical Metrology: A Review. Micromachines. 2025-07-22. https://doi.org/10.3390/mi16080838