Semiconductor Ion Implantation Scheduling under Sequence-Dependent Setup Times and Group Constraints
Ho-Hyeon Park; Jun-Hee Han
- Published
- Publisher
- Society for e-Business Studies
- Journal / collection
- Korean Journal of Digital Industry
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.7838/kjdi.2026.31.1.057
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Cite this source
Ho-Hyeon Park; Jun-Hee Han. Semiconductor Ion Implantation Scheduling under Sequence-Dependent Setup Times and Group Constraints. Korean Journal of Digital Industry. 2026-02-28. https://doi.org/10.7838/kjdi.2026.31.1.057