A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces
Zhen Wu; Hu Zhang; Tianren Ming; Xiaoan Hu; Fengkai Luan
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Scientific Reports
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s41598-026-57348-x
The original publisher provides the full text and its access options.
Cite this source
Zhen Wu; Hu Zhang; Tianren Ming; Xiaoan Hu; Fengkai Luan. A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces. Scientific Reports. 2026-06-11. https://doi.org/10.1038/s41598-026-57348-x