An Advanced Ion Microscope for Semiconductor Process Control and High-Resolution SIMS Nanoanalytics
Peter Gnauck; Alexander Ost; Torsten Richter
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2025p0507
The original publisher provides the full text and its access options.
Cite this source
Peter Gnauck; Alexander Ost; Torsten Richter. An Advanced Ion Microscope for Semiconductor Process Control and High-Resolution SIMS Nanoanalytics. International Symposium for Testing and Failure Analysis. 2025-11-16. https://doi.org/10.31399/asm.cp.istfa2025p0507