Platinum Deposition on Silicon-Based Semiconductor Devices
Mathias Fritz; Ammon Riedel; Finn Merlin Deckert; Andreas Bund
- Published
- Publisher
- The Electrochemical Society
- Journal / collection
- ECS Meeting Abstracts
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1149/ma2025-02221296mtgabs
The original publisher provides the full text and its access options.
Cite this source
Mathias Fritz; Ammon Riedel; Finn Merlin Deckert; Andreas Bund. Platinum Deposition on Silicon-Based Semiconductor Devices. ECS Meeting Abstracts. 2025-11-24. https://doi.org/10.1149/ma2025-02221296mtgabs