Optimization of 3D Nanosheet Transistor Design for Advanced Technology Nodes Beyond 3nm
Stephanie Y. Chang; Yulin Deng
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE 20th Nanotechnology Materials and Devices Conference (NMDC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/nmdc64551.2025.11233998
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Cite this source
Stephanie Y. Chang; Yulin Deng. Optimization of 3D Nanosheet Transistor Design for Advanced Technology Nodes Beyond 3nm. 2025 IEEE 20th Nanotechnology Materials and Devices Conference (NMDC). 2025-10-09. https://doi.org/10.1109/nmdc64551.2025.11233998