Irradiation effects of filtered beams of ionic liquid ion sources on semiconductor materials
Alexander C. G. Storey; Shaun Boodram; Aydin Sabouri; Carla Sofia Perez-Martinez
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Journal of Applied Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0322936
The original publisher provides the full text and its access options.
Cite this source
Alexander C. G. Storey; Shaun Boodram; Aydin Sabouri; Carla Sofia Perez-Martinez. Irradiation effects of filtered beams of ionic liquid ion sources on semiconductor materials. Journal of Applied Physics. 2026-05-13. https://doi.org/10.1063/5.0322936