Recent insights in direct extraction of access resistance components in NSFET and CFET devices with the cascaded transistor method
P. Eyben; A. Pondini; H. Arimura; T. Chiarella; R. Duflou; H. Mertens; C. Porret; E. Rosseel; R. Sarkar; M. Hosseini; X. Zhou; J. Mitard; N. Horiguchi
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Japanese Journal of Applied Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.35848/1347-4065/ae41c8
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Cite this source
P. Eyben; A. Pondini; H. Arimura; T. Chiarella; R. Duflou; H. Mertens; C. Porret; E. Rosseel; R. Sarkar; M. Hosseini; X. Zhou; J. Mitard; N. Horiguchi. Recent insights in direct extraction of access resistance components in NSFET and CFET devices with the cascaded transistor method. Japanese Journal of Applied Physics. 2026-03-09. https://doi.org/10.35848/1347-4065/ae41c8