Multi-objective optimization of spray cleaning performance for advanced semiconductor packaging using response surface methodology
Chih-Chia Chen; Chih-Jui Lin; Yen-Hsun Huang; Kuan-Nien Yao; Bo-Yue Yang; Chuang-Wen Yao; Yiin-Kuen Fuh
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- The International Journal of Advanced Manufacturing Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s00170-026-18981-y
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Cite this source
Chih-Chia Chen; Chih-Jui Lin; Yen-Hsun Huang; Kuan-Nien Yao; Bo-Yue Yang; Chuang-Wen Yao; Yiin-Kuen Fuh. Multi-objective optimization of spray cleaning performance for advanced semiconductor packaging using response surface methodology. The International Journal of Advanced Manufacturing Technology. 2026-08-24. https://doi.org/10.1007/s00170-026-18981-y