Boosting ALD In 2 O 3 Transistor Performance Using Hybrid H 2 O and O 3 Co-Reactant
Ziheng Wang; Kai Jiang; Chen Wang; Hequn Zhou; Liankai Zheng; Zhiyu Lin; Mengwei Si
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Electron Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ted.2026.3707125
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Cite this source
Ziheng Wang; Kai Jiang; Chen Wang; Hequn Zhou; Liankai Zheng; Zhiyu Lin; Mengwei Si. Boosting ALD In 2 O 3 Transistor Performance Using Hybrid H 2 O and O 3 Co-Reactant. IEEE Transactions on Electron Devices. 2026-08. https://doi.org/10.1109/ted.2026.3707125