Monolithic 3D Stackable DRAM Design with BEOL-Compatible Oxide Channel Access Transistor
Po-Kai Hsu; Sungwon Cho; Janak Sharda; Hyeonwoo Park; Suman Datta; Shimeng Yu
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE International Memory Workshop (IMW)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/imw61990.2025.11026931
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Cite this source
Po-Kai Hsu; Sungwon Cho; Janak Sharda; Hyeonwoo Park; Suman Datta; Shimeng Yu. Monolithic 3D Stackable DRAM Design with BEOL-Compatible Oxide Channel Access Transistor. 2025 IEEE International Memory Workshop (IMW). 2025-05-18. https://doi.org/10.1109/imw61990.2025.11026931