White-light colorimetric interferometry for measurement of thickness and topography on semiconductor structures
Jaeseung Im; Heewoo Lee; Kyeongjun Jang; Soobong Choi
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Scientific Reports
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s41598-025-25799-3
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Cite this source
Jaeseung Im; Heewoo Lee; Kyeongjun Jang; Soobong Choi. White-light colorimetric interferometry for measurement of thickness and topography on semiconductor structures. Scientific Reports. 2025-11-25. https://doi.org/10.1038/s41598-025-25799-3