A Spatio-Temporal Conflict Elimination Search Algorithm for Automated Material Handling Systems in Semiconductor Fabs
Feng Miao; Zhipeng Lü; Junwen Ding
- Published
- Publisher
- Tsinghua University Press
- Journal / collection
- Tsinghua Science and Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.26599/tst.2024.9010241
The original publisher provides the full text and its access options.
Cite this source
Feng Miao; Zhipeng Lü; Junwen Ding. A Spatio-Temporal Conflict Elimination Search Algorithm for Automated Material Handling Systems in Semiconductor Fabs. Tsinghua Science and Technology. 2026-02. https://doi.org/10.26599/tst.2024.9010241