An improved semiconductor thin film thickness measurement method based on full-spectrum fitting technology
Zhisong Li; Long Lin; Zhenwei Zhang
- Published
- Publisher
- AIP Publishing
- Journal / collection
- AIP Advances
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0283487
The original publisher provides the full text and its access options.
Cite this source
Zhisong Li; Long Lin; Zhenwei Zhang. An improved semiconductor thin film thickness measurement method based on full-spectrum fitting technology. AIP Advances. 2025-11-01. https://doi.org/10.1063/5.0283487