Risk-Informed Alarm Rationalization for Process Safety in Semiconductor Chemical Supply Systems
Sheng-Hung Hsueh; Ching-Yu Hsu; Yu-Rui Liu; Yu-Ting Hsueh; Zong-Qi Huang; Ching-Chien Huang
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.7344806
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Sheng-Hung Hsueh; Ching-Yu Hsu; Yu-Rui Liu; Yu-Ting Hsueh; Zong-Qi Huang; Ching-Chien Huang. Risk-Informed Alarm Rationalization for Process Safety in Semiconductor Chemical Supply Systems. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.7344806