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Review of Oxide-Semiconductor-Based 3D DRAM: From Atomic-Level Physics to Monolithic System Integration

Xiaoran Zhao

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.7227603

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Cite this source

Xiaoran Zhao. Review of Oxide-Semiconductor-Based 3D DRAM: From Atomic-Level Physics to Monolithic System Integration. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.7227603

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