Innovative Thermal Approaches to Fault Isolation in Three-Dimensional Semiconductor Structures
Norimichi Chinone; Shimpei Tominaga
- Published
- Publisher
- ASM International
- Journal / collection
- EDFA Technical Articles
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.31399/asm.edfa.2025-4.p004
The original publisher provides the full text and its access options.
Cite this source
Norimichi Chinone; Shimpei Tominaga. Innovative Thermal Approaches to Fault Isolation in Three-Dimensional Semiconductor Structures. EDFA Technical Articles. 2025-11-01. https://doi.org/10.31399/asm.edfa.2025-4.p004