Industrialized free-electron lasers: utility-scale light source readiness for semiconductor manufacturing
Erik R. Hosler
- Published
- Publisher
- SPIE-Intl Soc Optical Eng
- Journal / collection
- Journal of Micro/Nanopatterning, Materials, and Metrology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1117/1.jmm.25.3.030901
The original publisher provides the full text and its access options.
Cite this source
Erik R. Hosler. Industrialized free-electron lasers: utility-scale light source readiness for semiconductor manufacturing. Journal of Micro/Nanopatterning, Materials, and Metrology. 2026-07-31. https://doi.org/10.1117/1.jmm.25.3.030901