Tribological properties and mechanisms of three kinds of hard thin films for semiconductor shear pin
Zhe Geng; Yu Zuo; Gaolian Shi; Zhangbin Jin; Yang Liu
- Published
- Publisher
- Emerald
- Journal / collection
- Industrial Lubrication and Tribology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1108/ilt-12-2025-0578
The original publisher provides the full text and its access options.
Cite this source
Zhe Geng; Yu Zuo; Gaolian Shi; Zhangbin Jin; Yang Liu. Tribological properties and mechanisms of three kinds of hard thin films for semiconductor shear pin. Industrial Lubrication and Tribology. 2026-06-29. https://doi.org/10.1108/ilt-12-2025-0578