Analysis of Energy-Efficient Multi-Heater Thermal Control for Semiconductor Vertical Furnaces
Koma Nishioka; Christian Milleneuve Budiono; Wataru Ohnishi; Takafumi Koseki; Akira Hirata; Tatsuya Yamaguchi
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/aim65483.2026.11658233
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Cite this source
Koma Nishioka; Christian Milleneuve Budiono; Wataru Ohnishi; Takafumi Koseki; Akira Hirata; Tatsuya Yamaguchi. Analysis of Energy-Efficient Multi-Heater Thermal Control for Semiconductor Vertical Furnaces. 2026 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM). 2026-07. https://doi.org/10.1109/aim65483.2026.11658233