Artificial intelligence in atomic layer deposition
Pouyan Navabi; Remya Ampadi Ramachandran; Harshdeep Bhatia; Majid Jaberi-Douraki; Urmila Diwekar; Cortino Sukotjo; Christos G. Takoudis
- Published
- Publisher
- American Vacuum Society
- Journal / collection
- Journal of Vacuum Science & Technology A
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1116/6.0004881
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Cite this source
Pouyan Navabi; Remya Ampadi Ramachandran; Harshdeep Bhatia; Majid Jaberi-Douraki; Urmila Diwekar; Cortino Sukotjo; Christos G. Takoudis. Artificial intelligence in atomic layer deposition. Journal of Vacuum Science & Technology A. 2025-10-16. https://doi.org/10.1116/6.0004881