Femtosecond laser modification process of semiconductor silicon carbide wafers
Xinyang Ling
- Published
- Publisher
- SPIE
- Journal / collection
- Advanced Laser Processing and Manufacturing IX
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3074898
The original publisher provides the full text and its access options.
Cite this source
Xinyang Ling. Femtosecond laser modification process of semiconductor silicon carbide wafers. Advanced Laser Processing and Manufacturing IX. 2025-11-19. https://doi.org/10.1117/12.3074898