Optimal Waste Heat Temperature in Semiconductor Cleanroom HVAC: Configuration-dependent Cost Structure and Operating Strategy
Yoong Chung; Yujun Jung; Chan Ho Song
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.6964505
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Yoong Chung; Yujun Jung; Chan Ho Song. Optimal Waste Heat Temperature in Semiconductor Cleanroom HVAC: Configuration-dependent Cost Structure and Operating Strategy. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.6964505