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Research literature / Preprint / posted paper

Role of a Precursor in Sub-4 nm In2O3 Semiconductor Films in Atomic Layer Deposition

Ju-Hyeon Lee; Byung-Ha Kwak; Ae Rim Choi; Dohee Kim; Seung Wook Ryu; Il-Kwon Oh

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.6035078

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Ju-Hyeon Lee; Byung-Ha Kwak; Ae Rim Choi; Dohee Kim; Seung Wook Ryu; Il-Kwon Oh. Role of a Precursor in Sub-4 nm In2O3 Semiconductor Films in Atomic Layer Deposition. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.6035078

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