Physics-structured graph neural networks for interpretable fault detection in semiconductor manufacturing processes
Chun-Pei Lin; Feiyang Ou; Yifei Wang; Chao Zhang; Sthitie Bom; James F. Davis; Panagiotis D. Christofides
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Digital Chemical Engineering
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1016/j.dche.2026.100337
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Cite this source
Chun-Pei Lin; Feiyang Ou; Yifei Wang; Chao Zhang; Sthitie Bom; James F. Davis; Panagiotis D. Christofides. Physics-structured graph neural networks for interpretable fault detection in semiconductor manufacturing processes. Digital Chemical Engineering. 2026-09. https://doi.org/10.1016/j.dche.2026.100337