Wafer Flow Time Control in Robotized Semiconductor Manufacturing Tools
Min-Chan Kim; Tae-Sun Yu
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Systems, Man, and Cybernetics: Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsmc.2025.3649646
The original publisher provides the full text and its access options.
Cite this source
Min-Chan Kim; Tae-Sun Yu. Wafer Flow Time Control in Robotized Semiconductor Manufacturing Tools. IEEE Transactions on Systems, Man, and Cybernetics: Systems. 2026-04. https://doi.org/10.1109/tsmc.2025.3649646