Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturing
Hae Lin Yang; Min Chan Kim; Gi-Beom Park; Ji-Yeon Park; Hyein Park; Jihoon Shin; Jinho Ahn; Jin-Seong Park
- Published
- Publisher
- IOP Publishing
- Journal / collection
- International Journal of Extreme Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/2631-7990/ae536b
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Cite this source
Hae Lin Yang; Min Chan Kim; Gi-Beom Park; Ji-Yeon Park; Hyein Park; Jihoon Shin; Jinho Ahn; Jin-Seong Park. Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturing. International Journal of Extreme Manufacturing. 2026-03-31. https://doi.org/10.1088/2631-7990/ae536b