The Application of Polyimide used in Semiconductor Industry: A Review
Department of Physics and Mechanical & Electrical Engineering, Hubei University of Education, Wuhan 430205, P. R. China; Jikang Liu; Jia Wei; Department of Physics and Mechanical & Electrical Engineering, Hubei University of Education, Wuhan 430205, P. R. China; Chenye Lia; Department of Physics and Mechanical & Electrical Engineering, Hubei University of Education, Wuhan 430205, P. R. China; Yao Wang; Wuhan College Interdisciplinary Artificial Intelligence Research Institute, Wuhan 430205, P. R. China
- Published
- Publisher
- Journal of Microelectronic Manufacturing
- Journal / collection
- Journal of Microelectronic Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.33079/jomm.25112701
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Cite this source
Department of Physics and Mechanical & Electrical Engineering, Hubei University of Education, Wuhan 430205, P. R. China; Jikang Liu; Jia Wei; Department of Physics and Mechanical & Electrical Engineering, Hubei University of Education, Wuhan 430205, P. R. China; Chenye Lia; Department of Physics and Mechanical & Electrical Engineering, Hubei University of Education, Wuhan 430205, P. R. China; Yao Wang; Wuhan College Interdisciplinary Artificial Intelligence Research Institute, Wuhan 430205, P. R. China. The Application of Polyimide used in Semiconductor Industry: A Review. Journal of Microelectronic Manufacturing. 2025-11-27. https://doi.org/10.33079/jomm.25112701