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Research literature / Conference paper

Mathematical and Simulation-Based Analysis of Multiple-Load Mobile Transport Systems in Semiconductor Manufacturing

Sungwook Jang; Young Jae Jang

Published
Publisher
IEEE
Journal / collection
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/asmc64512.2025.11010675

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Sungwook Jang; Young Jae Jang. Mathematical and Simulation-Based Analysis of Multiple-Load Mobile Transport Systems in Semiconductor Manufacturing. 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2025-05-05. https://doi.org/10.1109/asmc64512.2025.11010675

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