Light-induced damage in semiconductor device manufacturing: Present and future challenges
Ester Abram; Reynolds Dziobek-Garrett; Vina Faramarzi; Roland Bliem; Paul Planken
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Journal of Applied Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0308054
The original publisher provides the full text and its access options.
Cite this source
Ester Abram; Reynolds Dziobek-Garrett; Vina Faramarzi; Roland Bliem; Paul Planken. Light-induced damage in semiconductor device manufacturing: Present and future challenges. Journal of Applied Physics. 2026-02-24. https://doi.org/10.1063/5.0308054